SIMULATION OF GROWTH IN PYROLYTIC LASER-CVD OF MICROSTRUCTURES .1. ONE-DIMENSIONAL APPROACH

Authors
ARNOLD N KULLMER R BAUERLE D
Citation
N. Arnold et al., SIMULATION OF GROWTH IN PYROLYTIC LASER-CVD OF MICROSTRUCTURES .1. ONE-DIMENSIONAL APPROACH, Microelectronic engineering, 20(1-2), 1993, pp. 31-41
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
20
Issue
1-2
Year of publication
1993
Pages
31 - 41
Database
ISI
SICI code
0167-9317(1993)20:1-2<31:SOGIPL>2.0.ZU;2-A
Abstract
Self-consistent model calculations on pyrolytic laser direct writing a re presented. The theoretical results are compared with experimental d ata.