LASER CLEANING REMOVES PARTICLES FROM SURFACES

Authors
ZAPKA W ZIEMLICH W LEUNG WP TAM AC
Citation
W. Zapka et al., LASER CLEANING REMOVES PARTICLES FROM SURFACES, Microelectronic engineering, 20(1-2), 1993, pp. 171-183
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
20
Issue
1-2
Year of publication
1993
Pages
171 - 183
Database
ISI
SICI code
0167-9317(1993)20:1-2<171:LCRPFS>2.0.ZU;2-W
Abstract
Laser-induced removal of particles from surfaces was demonstrated. Suc h ''laser cleaning'' can be performed on the bare contaminated surface or with additional micron-thickness liquid film coverage on the surfa ce. With the latter ''steam laser cleaning'' we achieved removal of ep oxy, alumina, silicon, and gold particles of size 0.1 mum to 10 mum fr om silicon surfaces. The proposed mechanism of particle ejection is de scribed.