REFLECTION ELECTRON HOLOGRAPHIC OBSERVATION OF SURFACE DISPLACEMENT FIELD

Reflection electron holography was applied to the observation of the s urface displacement field induced by a dislocation. The detailed surfa ce topography including the terminating step height was quantitatively observed. The effect of diffraction phase shift on the measurement wa s estimated based on the columnar approximation with phase calculation by matrix formulation of the dynamical theory. The result shows the d iffraction phase shift does not affect the surface topography observat ion except for the core region of the dislocation.