LOW-TEMPERATURE GROWTH AND CHARACTERIZATION OF ZNSE FILMS GROWN ON GAAS

Metalorganic vapor phase epitaxy (MOVPE) growth experiments of ZnSe on GaAs (100) are described using ditertiary butylselenide as the seleni um source. The growth temperature was varied between 300 and 400-degre es-C and the growth rate was determined. Below a vapor pressure ratio P(Se)/P(Zn) of about 5, the selenium is the growth limiting component. The quality of the samples was analyzed by Nomarski microscopy, x-ray diffraction, high resolution transmission electron microscopy, and ph otoluminescence. Although the selenium-precursor was not specially pur ified, a sharp excitonic luminescence appears in samples grown at 400- degrees-C. The MOVPE growth of ZnSe still suffers from prereactions wh en H2Se is used. The optimum growth is above 450-degrees-C even with p recursors as DMSe or DESe which are less harmful than the hydride. Thi s paper reports results obtained with a novel selenium-precursor: dite rtiarybutylselenide.1