S. Mirzapour et al., INFLUENCE OF AIR-FLOW RATE ON STRUCTURAL AND ELECTRICAL-PROPERTIES OFUNDOPED INDIUM OXIDE THIN-FILMS, Materials chemistry and physics, 33(3-4), 1993, pp. 204-207
Using the spray pyrolysis technique thin films of indium oxide were pr
epared on Corning glass (7059) at a substrate temperature of 425-degre
es-C at different flow rates. The electrical and structural properties
of these films were studied. The Hall measurements at room temperatur
e showed that the films prepared in an air flow rate of 7 litre min-1
have the highest mobility of 47 cm2 V-1 s-1 and a minimum resistivity
of 1.125x10(-3) OMEGA cm. The X-ray diffraction patterns showed that t
he films have a preferred orientation of [400] which peaks at the air
flow rate of 7 litre min-1.