PHOTOLITHOGRAPHY OVERVIEW FOR 64 MEGABIT PRODUCTION

Authors
LESLIE T ARDEN W BENJACOB J COLEMAN D POLIMENI J PREIN F
Citation
T. Leslie et al., PHOTOLITHOGRAPHY OVERVIEW FOR 64 MEGABIT PRODUCTION, Microelectronic engineering, 21(1-4), 1993, pp. 11-14
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
21
Issue
1-4
Year of publication
1993
Pages
11 - 14
Database
ISI
SICI code
0167-9317(1993)21:1-4<11:POF6MP>2.0.ZU;2-1