PARAMETRIC STUDIES OF A SPECTRALLY NARROWED KRF EXCIMER-LASER FOR THEDEEP UV STEPPER

Authors
SENGUPTA U ISHIHARA T SANDSTROM R REISER C
Citation
U. Sengupta et al., PARAMETRIC STUDIES OF A SPECTRALLY NARROWED KRF EXCIMER-LASER FOR THEDEEP UV STEPPER, Microelectronic engineering, 21(1-4), 1993, pp. 43-46
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
21
Issue
1-4
Year of publication
1993
Pages
43 - 46
Database
ISI
SICI code
0167-9317(1993)21:1-4<43:PSOASN>2.0.ZU;2-V
Abstract
This paper, in view of excimer stepper requirements, discusses the dep endence of one laser performance specification on other specifications and their relationship to operating conditions. It shows that there i s a correlation between laser specifications, stepper performance, res ist sensitivity and total cost of the process.