MEETING THE PATTERN DEFINITION CHALLENGE OF 256MBIT DRAM X-RAY MASKS

Authors
KOEK B GRANT R HAAS L JENNINGS B WALLMAN B
Citation
B. Koek et al., MEETING THE PATTERN DEFINITION CHALLENGE OF 256MBIT DRAM X-RAY MASKS, Microelectronic engineering, 21(1-4), 1993, pp. 153-158
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
21
Issue
1-4
Year of publication
1993
Pages
153 - 158
Database
ISI
SICI code
0167-9317(1993)21:1-4<153:MTPDCO>2.0.ZU;2-Y