HIGH-CURRENT FIB SYSTEM FOR MICROMECHANICS APPLICATION

Authors
BISCHOFF L HESSE E HOFMANN G NAEHRING FK PROBST W SCHMIDT B TEICHERT J
Citation
L. Bischoff et al., HIGH-CURRENT FIB SYSTEM FOR MICROMECHANICS APPLICATION, Microelectronic engineering, 21(1-4), 1993, pp. 197-200
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
21
Issue
1-4
Year of publication
1993
Pages
197 - 200
Database
ISI
SICI code
0167-9317(1993)21:1-4<197:HFSFMA>2.0.ZU;2-E
Abstract
A high current Focused Ion Beam (FIB) system, designed to achieve curr ent densities above 10 A/cm2 is presented. The system parameters and p roperties are discussed and first applications in the field of microme chanics are shown.