ONLINE DETECTION AND MONITORING OF PLASMA ETCH DAMAGE TO SEMIINSULATING GAAS

Authors
HERBERT PAF MURTAGH M KELLY PV CREAN GM KELLY WM
Citation
Paf. Herbert et al., ONLINE DETECTION AND MONITORING OF PLASMA ETCH DAMAGE TO SEMIINSULATING GAAS, Microelectronic engineering, 21(1-4), 1993, pp. 315-320
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
21
Issue
1-4
Year of publication
1993
Pages
315 - 320
Database
ISI
SICI code
0167-9317(1993)21:1-4<315:ODAMOP>2.0.ZU;2-O