FABRICATION OF MAGNETIC MICROSTRUCTURES BY USING THICK LAYER RESISTS

A fabrication process for 3D ferromagnetic micro patterns of an Fe/Ni alloy, based on conventional UV contact printing for thick resist laye rs, and on a pulse galvanoplating process, was investigated to form mi crostructures with high layer thickness and high aspect ratio. Resist patterns with 5 to 10 mum minimum feature size and up to 80 mum height were fabricated. From a weakly acidic Fe/Ni bath alloyed layers with Fe content up to 55% were deposited. The formed material has excellent corrosion resistivity and mechanical properties comparable to stainle ss steel. The material was found to be ferromagnetic with a high per m eability.