A fabrication process for 3D ferromagnetic micro patterns of an Fe/Ni
alloy, based on conventional UV contact printing for thick resist laye
rs, and on a pulse galvanoplating process, was investigated to form mi
crostructures with high layer thickness and high aspect ratio. Resist
patterns with 5 to 10 mum minimum feature size and up to 80 mum height
were fabricated. From a weakly acidic Fe/Ni bath alloyed layers with
Fe content up to 55% were deposited. The formed material has excellent
corrosion resistivity and mechanical properties comparable to stainle
ss steel. The material was found to be ferromagnetic with a high per m
eability.