PREPARATION OF BORON-NITRIDE FILMS BY INDIRECT HIGH-FREQUENCY ACTIVATION OF BORAZOLE

Authors
SMIRNOVA TP KHRAMOVA LV YASHKIN IL BAKLANOV PY KICHAI VN SYSOEVA NP
Citation
Tp. Smirnova et al., PREPARATION OF BORON-NITRIDE FILMS BY INDIRECT HIGH-FREQUENCY ACTIVATION OF BORAZOLE, Inorganic materials, 28(7), 1992, pp. 1118-1122
Citations number
14
Categorie Soggetti
Material Science
Journal title
Inorganic materials → ACNP
ISSN journal
00201685
Volume
28
Issue
7
Year of publication
1992
Pages
1118 - 1122
Database
ISI
SICI code
0020-1685(1992)28:7<1118:POBFBI>2.0.ZU;2-R