Hh. Busta et al., EMISSION CHARACTERISTICS OF SILICON VACUUM TRIODES WITH 4 DIFFERENT GATE GEOMETRIES, I.E.E.E. transactions on electron devices, 40(8), 1993, pp. 1530-1536
Arrays of 10 x 10, 30 x 30, and 50 x 50 phosphorus-doped, 0.005-0.025
OMEGA . cm, monocrystalline silicon field emitters have been fabricate
d with an emitter height of approximately 4.5 mum, a cone angle of 110
-degrees, and four gate openings ranging from 1.8 to 5.3 mum. The rims
of the gates are placed from coplanar with the apeces of the emitters
for the 1.8-mum devices, to fully recessed for the 5.3-mum devices. T
he devices have been characterized in terms of geometry-dependent beta
factors, scaling of emission currents with array size, temperature de
pendency from room temperature to 48 K, pressure dependency from 2.5 x
10(-9) to 0.8 x 10(-5) torr, current fluctuations at room temperature
and at 48 K, and image formation. All of the measurements have been p
erformed by operating the devices in the gate-induced field emission m
ode.