Systematic investigations have been performed concerning the effect of
growth temperature and beam pressure ratio on the structural perfecti
on and optical properties of molecular beam epitaxy (MBE) grown ZnSe o
n GaAs substrates. A surface phase diagram of ZnSe has been derived sh
owing the different surface reconstructions as a function of these gro
wth conditions. RHEED reflex profiling reveals more details about the
surface morphology occurring in different stages of the growth process
. The epitaxial layers are further characterized by means of X-ray dif
fraction and various optical techniques.