PROCEEDINGS OF THE 8TH BIENNIAL CONFERENCE ON INSULATING FILMS ON SEMICONDUCTORS - JUNE 2-5, 1993 DELFT, THE NETHERLANDS

Authors
BALK P DENIJS J
Citation
P. Balk et J. Denijs, PROCEEDINGS OF THE 8TH BIENNIAL CONFERENCE ON INSULATING FILMS ON SEMICONDUCTORS - JUNE 2-5, 1993 DELFT, THE NETHERLANDS, Microelectronic engineering, 22(1-4), 1993, pp. 211800011-211800011
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
22
Issue
1-4
Year of publication
1993
Pages
211800011 - 211800011
Database
ISI
SICI code
0167-9317(1993)22:1-4<211800011:POT8BC>2.0.ZU;2-4