A COMPARISON OF SOI TECHNOLOGIES AND MATERIALS, AND PROSPECTIVE FIELDS OF APPLICATION

Authors
RYSSEL H SCHORK R CHEN NX
Citation
H. Ryssel et al., A COMPARISON OF SOI TECHNOLOGIES AND MATERIALS, AND PROSPECTIVE FIELDS OF APPLICATION, Microelectronic engineering, 22(1-4), 1993, pp. 315-322
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
22
Issue
1-4
Year of publication
1993
Pages
315 - 322
Database
ISI
SICI code
0167-9317(1993)22:1-4<315:ACOSTA>2.0.ZU;2-B