EFFECTS OF THE CRYSTALS NONZERO ELECTRICAL-CONDUCTIVITY ON THE ROTATIONALLY DRIVEN MELT MOTION DURING CZOCHRALSKI SILICON GROWTH WITH A UNIFORM, TRANSVERSE MAGNETIC-FIELD

Citation
Js. Walker et Mg. Williams, EFFECTS OF THE CRYSTALS NONZERO ELECTRICAL-CONDUCTIVITY ON THE ROTATIONALLY DRIVEN MELT MOTION DURING CZOCHRALSKI SILICON GROWTH WITH A UNIFORM, TRANSVERSE MAGNETIC-FIELD, Journal of crystal growth, 132(1-2), 1993, pp. 31-42
Citations number
13
Categorie Soggetti
Crystallography
Journal title
ISSN journal
00220248
Volume
132
Issue
1-2
Year of publication
1993
Pages
31 - 42
Database
ISI
SICI code
0022-0248(1993)132:1-2<31:EOTCNE>2.0.ZU;2-Z
Abstract
This paper treats the melt motion during the Czochralski growth of sil icon with a uniform, horizontal, steady magnetic field. Here we only c onsider the motion driven by the rotations of the crystal and crucible about their common vertical axis. Our results show that the rotationa lly driven melt motion for the correct non-zero electrical conductivit y of the crystal is very different from that for an electrically insul ating crystal. The rotating, electrically conducting crystal acts as a generator which drives electric currents through the melt near the cr ystal face and free surface. These currents produce an electromagnetic body force which drives an azimuthal melt motion in the direction opp osite to the direction of the crystal's rotation. We found that the az imuthal velocity is virtually independent of the azimuthal coordinate, while the radial and axial velocities are virtually zero.