EFFECTS OF THE CRYSTALS NONZERO ELECTRICAL-CONDUCTIVITY ON THE ROTATIONALLY DRIVEN MELT MOTION DURING CZOCHRALSKI SILICON GROWTH WITH A UNIFORM, TRANSVERSE MAGNETIC-FIELD
Js. Walker et Mg. Williams, EFFECTS OF THE CRYSTALS NONZERO ELECTRICAL-CONDUCTIVITY ON THE ROTATIONALLY DRIVEN MELT MOTION DURING CZOCHRALSKI SILICON GROWTH WITH A UNIFORM, TRANSVERSE MAGNETIC-FIELD, Journal of crystal growth, 132(1-2), 1993, pp. 31-42
This paper treats the melt motion during the Czochralski growth of sil
icon with a uniform, horizontal, steady magnetic field. Here we only c
onsider the motion driven by the rotations of the crystal and crucible
about their common vertical axis. Our results show that the rotationa
lly driven melt motion for the correct non-zero electrical conductivit
y of the crystal is very different from that for an electrically insul
ating crystal. The rotating, electrically conducting crystal acts as a
generator which drives electric currents through the melt near the cr
ystal face and free surface. These currents produce an electromagnetic
body force which drives an azimuthal melt motion in the direction opp
osite to the direction of the crystal's rotation. We found that the az
imuthal velocity is virtually independent of the azimuthal coordinate,
while the radial and axial velocities are virtually zero.