Sol-gel and MOD processes have been used to deposit layered perovskite
films such as Bi4Ti3O12, SrBi2Ta2O9 and SrBi2NbTaO9 films on top of S
i(100) substrates with Ti/Pt electrodes. Their structural and electric
al properties have been studied as a function of processing. Additiona
lly sol-gel and MOD processes have been applied for SrTiO3 films. The
morphology of the layers has been characterised and compared with the
morphology of layered perovskite films.