SOL-GEL AND MOD PROCESSING OF LAYERED PEROVSKITE FILMS

Authors
KLEE M MACKENS U
Citation
M. Klee et U. Mackens, SOL-GEL AND MOD PROCESSING OF LAYERED PEROVSKITE FILMS, Integrated ferroelectrics, 12(1), 1996, pp. 11-22
Citations number
8
Categorie Soggetti
Physics, Condensed Matter","Engineering, Eletrical & Electronic","Physics, Applied
Journal title
Integrated ferroelectrics → ACNP
ISSN journal
10584587
Volume
12
Issue
1
Year of publication
1996
Pages
11 - 22
Database
ISI
SICI code
1058-4587(1996)12:1<11:SAMPOL>2.0.ZU;2-L
Abstract
Sol-gel and MOD processes have been used to deposit layered perovskite films such as Bi4Ti3O12, SrBi2Ta2O9 and SrBi2NbTaO9 films on top of S i(100) substrates with Ti/Pt electrodes. Their structural and electric al properties have been studied as a function of processing. Additiona lly sol-gel and MOD processes have been applied for SrTiO3 films. The morphology of the layers has been characterised and compared with the morphology of layered perovskite films.