DIELECTRIC ANALYSIS OF INTEGRATED CERAMIC THIN-FILM CAPACITORS

The paper presents a survey on the dielectric analysis of integrated c eramic capacitors. The thin film examples are based on high - permitti vity paraelectric SrTiO3, solid-solution (Ba,Sr)TiO3, ferroelectric Pb (Zr,Ti)O-3, and superparaelectric BaTiO3. The current state of knowled ge concerning the temperature dependence, the voltage dependence, and the frequency dependence of the permittivity and the losses is reviewe d. The relation of the dielectric properties to the processing and mic rostructure of the ceramic thin films is outlined. With respect to the understanding of the leakage mechanism, further evidence for a comple te depletion of the titanate films is presented and a refined quantita tive model of the field dependence is sketched.