Dielectric DC breakdown strengths of ferroelectric lead zirconate tita
nate (PZT) thick films are examined with respect to the film thickness
, top electrode area, and grain size. The breakdown strengths of PZT(5
2/48) films are as much as two times higher than the predicted values
empirically derived from bulk ceramics by earlier researchers. I-V cha
racteristics show three distinct conduction mechanisms on 8 mu m PZT f
ilms. Samples aged in air for one year show lower breakdown strengths,
higher leakage currents, and higher onset voltages of the space-charg
e-limited conduction (SCLC) mechanism.