ENERGY-FILTERED HIGH-RESOLUTION ELECTRON-MICROSCOPY FOR QUANTITATIVE SOLID-STATE STRUCTURE DETERMINATION

Energy-filtered (or selected) electron imaging is one of the future di rections of high-resolution electron microscopy (HREM). In this paper, the characteristics and applications of energy-selected electron imag ing at high-resolution for structure determinations are illustrated. I t is shown that image contrast can be dramatically improved with the u se of an energy filter. High-resolution chemical-sensitive imaging usi ng ionization-loss electrons is demonstrated in studies of Ni/Ti and A l/Ti multilayer thin films. It is also shown that the spatial resoluti on of energy-selected ionization edge electron images is dominated by the signal-to-noise ratio. Experimental parameters which may be select ed to improve the signal-to-noise ratio are discussed.