STRAIGHTNESS MEASUREMENT SYSTEM WITH INTE GRATED BEAM POSITION CORRECTION

Authors
PFEIFER T LANG M THIEL J
Citation
T. Pfeifer et al., STRAIGHTNESS MEASUREMENT SYSTEM WITH INTE GRATED BEAM POSITION CORRECTION, TM. Technisches Messen, 60(5), 1993, pp. 192-197
Citations number
NO
Categorie Soggetti
Instument & Instrumentation
Journal title
TM. Technisches Messen → ACNP
ISSN journal
01718096
Volume
60
Issue
5
Year of publication
1993
Pages
192 - 197
Database
ISI
SICI code
0171-8096(1993)60:5<192:SMSWIG>2.0.ZU;2-J
Abstract
Modern straightness measurement systems use the straightness of laser beams as a reference. Internal effects within the laser affect the bea m straightness and introduce measurement errors. The proposed correcti on system measures the unwanted laser beam movement during the process and allows immediate correction of the measurement results.