A SELF-CONSISTENT ONE-DIMENSIONAL MODEL FOR HE NONEQUILIBRIUM KINETICS IN RF DISCHARGES

A self-consistent one-dimensional model for nonequilibrium kinetics in RF discharges has been elaborated which connects two different RF dis charge modeling viewpoints: a microscopic viewpoint (Boltzmann equatio n for the electron energy distribution function, master equation for t he electronic states of He) and a macroscopic one (fluid model). The r esults show the role of excited states in affecting the macroscopic pr operties (electron density, electron temperature, electric field) of t he system. The reliability of the model is assessed by comparing the r esults obtained by it with existing experimental results. In general, a satisfactory agreement is obtained.