C. Wang et al., NUMERICAL MODELING OF THE DISK-EDGE FIELD EMITTER TRIODE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(2), 1997, pp. 394-397
In this article, a new numerical algorithm, a finite-difference method
in a nonorthogonal curvilinear coordinate system, is presented. This
algorithm can be used for efficient simulation of a disk-edge held emi
tter. With the boundary-conforming coordinate lines, this method can d
eal with arbitrary microemitter shapes. Simulation results are present
ed for a unit cell, consisting of a disk-edge field emitter with ''coc
ktail glass'' structure. Dependence of the field enhancement factor, e
lectron trajectories, and emission current upon geometrical factors ar
e presented. (C) 1997 American Vacuum Society.