EMISSION CHARACTERIZATION OF DIAMOND-COATED SI FIELD-EMISSION ARRAYS

Authors
ZHIRNOV VV GIVARGIZOV EI KANDIDOV AV SELEZNEV BV ALIMOVA AN
Citation
Vv. Zhirnov et al., EMISSION CHARACTERIZATION OF DIAMOND-COATED SI FIELD-EMISSION ARRAYS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(2), 1997, pp. 446-449
Citations number
14
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
15
Issue
2
Year of publication
1997
Pages
446 - 449
Database
ISI
SICI code
1071-1023(1997)15:2<446:ECODSF>2.0.ZU;2-P
Abstract
Large-area arrays of Si tips (10(5)-10(6) tips in an array) with diamo nd coating were tested in pulse and de modes. The arrays demonstrated uniform emission, reproducible I-V plots, and low emission threshold. The maximum current achieved with diamond-coated Si arrays was 80 mA i n pulse made. Emission characteristics were found to be superior to th e uncoated Si tip arrays or diamond-coated flat cathodes. (C) 1997 Ame rican Vacuum Society.