P. Vennegues et al., MICROSTRUCTURAL STUDY OF PSEUDOMORPHIC ZNSE FILMS GROWN ON BARE GAAS SUBSTRATES, Journal of crystal growth, 182(1-2), 1997, pp. 45-52
The nature and the densities of the defects encountered in pseudomorph
ic ZnSe films grown by molecular beam epitaxy (MBE) on bare GaAs subst
rates are described. When MBE growth is performed directly on epiready
substrates, the poor quality of the starting surface leads to a three
dimensional (3D) growth mode and, therefore to highly defective sampl
es (densities of defects up to 10(10) cm(-2)). We propose a possible m
echanism for the formation of stacking faults which takes into account
the presence of growth islands. The quality of the films is greatly i
mproved by etching the GaAs substrate. Depending on the in situ therma
l treatment of the etched substrate, the surface can be (2 x 3) or (4
x 3) reconstructed. Samples grown on (4 x 3) reconstructed GaAs surfac
e have defect densities in the 10(6) cm(-2) range. Very good quality Z
n0.97Be0.03Se films can be grown on such ZnSe buffer layers.