S-A step growth mechanism of (0 0 1) surfaces of diamond structure cry
stals was investigated by means of quantum chemical calculations. Adat
oms migrating on dimer rows on the terrace become stationary at the do
wn side of S-A steps, because of the high potential energy wall preven
ting the adatoms running up the S-A steps. Thus, migrating adatoms hav
e a higher probability of remaining at the down side of S-A steps than
at any point of the terrace. The second adatom running down the S-A s
tep or migrating on the same dimer row of the lower terrace has a high
probability of meeting the first adatom remaining at the down side of
the S-A step, and a new dimer is formed. It was concluded that the S-
A step growth is a complex event; i.e., the formation of an isolated d
imer at the S-A step is followed by S-B step growth starting from the
newly produced dimer as the smallest nucleus. The S-B step growth prog
ressing along the S-A step means one step propagation of the S-A step
growth.