SIMPLE MODELING OF COPLANAR WAVE-GUIDE ON THICK DIELECTRIC OVER LOSSYSUBSTRATE

We present a simple semi-empirical high-frequency equivalent circuit m odel to characterize the coplanar waveguide structure, which consists of relatively thick metal line on very thick polyimide over lossy subs trate such as Si BICMOS wafer, Considering the geometric dependence of the conductive loss and the skin effect of the substrate loss, we der ive modified models for the equivalent circuit elements, We verify the validity of our model by comparing it with the experimental measureme nt, Our model is simple enough not only to be suitable for efficient c ircuit simulation but also to be useful for process characterization a nd design.