We report the first fabrication of a GaSb n-channel modulation-doped f
ield-effect transistor (MODFET) grown by molecular beam epitaxy. The m
odulation-doped structure exhibits a room temperature Hall mobility of
3140 cm(2) V-1 s(-1) and 77 K value of 16000 cm(2) V-1 s(-1), with co
rresponding sheet carrier densities of 1.3 x 10(12) cm(-2) and 1.2 x 1
0(12) cm(-2). Devices with 1 mu m gate length yield transconductances
of 180 mS mm(-1) and output of 5 mS mm(-1) at 85 K. The device charact
eristics indicate that electron transport in the channel occurs Primar
ily via the L-valley of GaSb above 85 K. The effective electron satura
tion velocity is estimated to be 0.9 x 10(7) cm s(-1). Calculations sh
ow that a complementary circuit consisting of GaSb n- and p-channel MO
DFETs can provide at least two times improvement in performance over A
lGaAs/GaAs complementary circuits. (C) 1997 Elsevier Science Ltd.