HBT IC MANUFACTURABILITY AND RELIABILITY

HBT based integrated circuits have reached LSI levels of integration c omplexity with both GaAs- and InP-based technologies. A wide range of application areas are suitable for HBT integrated circuits ranging in frequencies from below 1 GHz to above 40 GHz. In this article we will present manufacturability and reliability of these technologies with p articular emphasis on InP-based HBT IC's. Technology requirements for different application areas are presented with specific integrated cir cuit examples. Key HBT reliability issues are also presented including discrete devices and IC reliability. (C) 1997 Elsevier Science Ltd.