ULTRA-THIN LEAD TITANATE FILMS PREPARED BY TRIPOLE MAGNETRON SPUTTERING

Ultra-thin lead titanate (PbTiO3) films of 6 to 80 nm in thickness wer e deposited on single crystal MgO (100) substrate by employing tripole magnetron sputtering system, which was deviced to make the erosion ar ea on the co-axial targets movable, and hence make a layer-by-layer pr ocess realized. Thin films of PbTiO3 with highly-oriented perovskite s ingle phase were obtained at substrate temperature of 550 degrees C. I n the films thicker than 20 nm, the X-ray diffraction showed clearly t he separated(100) and (001) peaks, while in those thinner than 10 nm, two peaks seemed to be superimposed onto a single peak, suggesting a g radual transition into pseudocubic. Far-infrared spectroscopy indicate d a thickness-dependent absorption at wavenumber of 85 cm(-1) which ma y be attributed to the phonon related to the Pb-TiO6 vibration.