RECOIL SPECTROMETRY AND RBS STUDIES OF STRONTIUM BISMUTH TANTALATE FILMS ON PT TI ELECTRODES/

Authors
STANNARD WB JOHNSTON PN ELBOUANANI M WALKER SR BUBB IF SCOTT JF COHEN DD DYTLEWSKI N
Citation
Wb. Stannard et al., RECOIL SPECTROMETRY AND RBS STUDIES OF STRONTIUM BISMUTH TANTALATE FILMS ON PT TI ELECTRODES/, Integrated ferroelectrics, 12(2-4), 1996, pp. 177-184
Citations number
5
Categorie Soggetti
Physics, Condensed Matter","Engineering, Eletrical & Electronic","Physics, Applied
Journal title
Integrated ferroelectrics → ACNP
ISSN journal
10584587
Volume
12
Issue
2-4
Year of publication
1996
Pages
177 - 184
Database
ISI
SICI code
1058-4587(1996)12:2-4<177:RSARSO>2.0.ZU;2-0
Abstract
Heavy Ion Elastic Recoil Detection Spectrometry and Rutherford Backsca ttering Analysis have been used to analyse thin films of strontium bis muth tantalate (SBT). This study uses these analysis techniques to inv estigate the interdiffusion of various elements In SBT/Pt/Ti/SiO2/Si s tructures which occurs during the annealing process. Evidence of diffu sion of bismuth through the platinum electrode and titanium is shown w ithin the platinum electrode.