(111)-ORIENTED BATIO3 THIN-FILMS HYDROTHERMALLY FORMED ON TIO2 SI SUBSTRATE/

Barium titanate (BaTiO3) thin films with high(111)-orientation were su ccessfully grown on TiO2- covered Si(111) substrate using hydrothermal method, where the TiO2 layer was previously fabricated at room temper ature by means of ion-beam-assisted deposition. This processing method provides a simple mild-chemical route for directly producing the anal ogous crystalline films on different substrates. The BaTiO3 films did not reach the TiO2/Si interface even if the hydrothermal treatment was prolonged to 24 hours. Both Rutherford backscattering and spread-resi stance profiling characterizations confirmed the diffusion nature of t he formed BaTiO3/TiO2/Si system.