MODIFICATION OF AL-BASED METALLIZATION FOR IMPROVED SURFACE-MORPHOLOGY

Authors
ZABOROWSKI M BARCZ A
Citation
M. Zaborowski et A. Barcz, MODIFICATION OF AL-BASED METALLIZATION FOR IMPROVED SURFACE-MORPHOLOGY, Microelectronic engineering, 37-8(1-4), 1997, pp. 341-346
Citations number
7
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
37-8
Issue
1-4
Year of publication
1997
Pages
341 - 346
Database
ISI
SICI code
0167-9317(1997)37-8:1-4<341:MOAMFI>2.0.ZU;2-T
Abstract
The effect of introducing an additional interlayer into the classical Al-based metallization on the morphology of the resultant surface is s tudied by SEM, stylus profilometry and optical microscopy with digital image processing. It was found that the presence of buried films of C r, Ti, W and particularly Ti:W alloy strongly reduces the density and/ or the size of hillocks.