V. Aubryfortuna et al., WHAT IS THE ROLE OF THE METAL ON THE FERMI-LEVEL POSITION AT THE INTERFACE WITH IV-IV COMPOUNDS, Microelectronic engineering, 37-8(1-4), 1997, pp. 573-579
The Schottky barrier height of Ti and W on n-type and p-type Si1-x-yGe
xCy alloys has been investigated as a function of the composition and
for different states of strain of the epilayers. The barrier on p-type
, Phi(Bp), differs slightly on the metal. However, the variation of th
e band gap is better correlated to the barrier heights to W than those
to Ti. In the case of n-type, the addition of Ge in Si does not modif
y the position of the Fermi level at the interface with W, while it st
rongly shifts E-F towards the valence band at the interface with Ti. I
n addition, we have observed a degradation of the interfaces for the h
igh Ge content, and this degradation is more pronounced for Ti. In con
clusion, the dependence of the Schottky barrier height on the metal wo
rkfunction is more reduced for IV-IV compounds than for pure Si and th
e addition of Ge leads to a change in the Fermi level pinning position
with Ti.