I. Belousov et al., LOCAL NUCLEATION AND LATERAL CRYSTALLIZATION OF THE SILICIDE PHASES IN THE COSI2 BUFFER LAYER OF YBA2CU3O7-X COSI2/SI STRUCTURE/, Microelectronic engineering, 37-8(1-4), 1997, pp. 581-587
The phenomena of the local nucleation and lateral crystal growth of co
balt silicide phases have been investigated with the emphasis on a pos
sible cause of the surface roughness and pinholes of the silicide laye
r. Local nucleation of the CoSi2 grains on the structural defects of t
he silicon surface is found for the silicide films formed by vacuum an
nealing the Co/Si(100),(111) structure. Self-sustaining crystallizatio
n of the CoSi2 phase around a crystal defect is observed. Lateral grow
th of the silicide crystallites from the Si crystal defects indicates
that the lateral growth mode is preferable for the silicide phases at
the Co-Si interface. The silicide film surface and CoSi2/Si interface
are much smoother if an additional zircon (Zr) layer is deposited onto
the Co film before subsequent annealing. The CoSi2 films were used as
a buffer layer for the YBCO/CoSi2/Si and YBCO/CeO2/YSZ/CoSi2/Si/Al2O3
heterostructures in this work. The superconducting transition tempera
tures of the YBCO films was found to be 86 K.