SCANNING THERMAL MICROSCOPE TIP-INDUCED CHEMICAL-REACTION ON SOLID ORGANOMETALLIC COMPOUND THIN-FILMS

This article has successfully demonstrated for the first time a chemic al reaction induced by a resistive thermal tip. The resulting structur es were subsequently imaged by scanning thermal microscopy (SThM) and atomic force microscopy. The thermal conductivity contrast in SThM ima ges suggested that palladium acetate thin film could be decomposed to palladium metal. The resulting palladium metallic features can form do wn to the substrate and adhere well on the substrate by using thinner precursor palladium acetate film. The effect of control resistance and tip scan rate on resulting features has also been studied. The result s obtained indicate the potential application of SThM tip induced chem ical reaction in device fabrication. (C) 1997 American Vacuum Society.