Citation
A. Gruber et J. Gspann, NANOPARTICLE IMPACT MICROMACHINING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2362-2364
Citations number
7
Journal title
ISSN journal
10711023
Volume
15
Issue
6
Year of publication
1997
Pages
2362 - 2364
Database
ISI
SICI code
1071-1023(1997)15:6<2362:NIM>2.0.ZU;2-E
Abstract
Nanoparticles of about 1000 molecules of CO2 accelerated to 20 km/s ar
e used for surface micromachining. Isolated impacts are found to gener
ate hillocks of about 0.5 nm in height and 20 nm in radius on silicon.
The cluster material penetrates up to 20 nm into the target, suggesti
ng the initial formation of transitory craters that relax by elastic r
ebound. (C) 1997 American Vacuum Society.