ION-INDUCED DAMAGE IN STRAINED CDZNSE ZNSE QUANTUM-WELL STRUCTURES/

Citation
Lm. Sparing et al., ION-INDUCED DAMAGE IN STRAINED CDZNSE ZNSE QUANTUM-WELL STRUCTURES/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2652-2655
Citations number
14
ISSN journal
10711023
Volume
15
Issue
6
Year of publication
1997
Pages
2652 - 2655
Database
ISI
SICI code
1071-1023(1997)15:6<2652:IDISCZ>2.0.ZU;2-B
Abstract
A study of the effects of reactive ion etching on molecular beam epita xy grown (CdxZn1-xSe/ZnSe) strained quantum well (QW) samples using lo w temperature photoluminescence reveals a blue shift in the characteri stic peak position of the 8 nm QW when exposed to plasmas of H-2, D-2, or He. Based on experimental results we suggest that this blue shift is a result of ion induced damage interacting with strain present in t he as-grown QW. The QW is compressively strained at the interface with additional local strains in the QW lattice due to its random ternary alloy composition. The shallowest QW samples exhibit a peak in the blu e shift as a function of bias voltage, with a reduced blue shift seen at high voltages. (C) 1997 American Vacuum Society.