APPLICATION OF AMORPHOUS-SILICON SUBWAVELENGTH GRATINGS IN POLARIZATION SWITCHING VERTICAL-CAVITY SURFACE-EMITTING LASERS

Authors
CHOU SY SCHABLITSKY SJ ZHUANG L
Citation
Sy. Chou et al., APPLICATION OF AMORPHOUS-SILICON SUBWAVELENGTH GRATINGS IN POLARIZATION SWITCHING VERTICAL-CAVITY SURFACE-EMITTING LASERS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2864-2867
Citations number
13
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
15
Issue
6
Year of publication
1997
Pages
2864 - 2867
Database
ISI
SICI code
1071-1023(1997)15:6<2864:AOASGI>2.0.ZU;2-Y
Abstract
Amorphous silicon subwavelength gratings have been fabricated. Their u se as quarter-wave plates in polarization switching vertical-cavity su rface-emitting lasers with tunable oscillation frequency as high as se veral terahertz is proposed. The substantial increase in frequency com es from a reduction in the oscillator cavity length due to the small t hickness of the grating (only about one-third of the wavelength thick) . The frequency tuning is provided by fabricating the wave plate and a partial reflector monolithically on a movable microcantilever. (C) 19 97 American Vacuum Society.