NANOLITHOGRAPHY WITH NEUTRAL CHROMIUM AND HELIUM-ATOMS

Authors
BREZGER B SCHULZE T DRODOFSKY U STUHLER J NOWAK S PFAU T MLYNEK J
Citation
B. Brezger et al., NANOLITHOGRAPHY WITH NEUTRAL CHROMIUM AND HELIUM-ATOMS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2905-2911
Citations number
23
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
15
Issue
6
Year of publication
1997
Pages
2905 - 2911
Database
ISI
SICI code
1071-1023(1997)15:6<2905:NWNCAH>2.0.ZU;2-K
Abstract
We describe two experiments that use neutral atomic beam techniques to write nanostructures. In the chromium experiment, we have used neutra l chromium atoms to write one-and two-dimensional periodic nanometer-s cale structures in a direct way. The periodic structure is given to th e atomic beam by a laser light mask. In a second experiment, we have u sed a self-assembling monolayer as a resist for metastable helium atom s in a proximity printing experiment. (C) 1997 American Vacuum Society .