MICROGRIPPERS CREATED IN MICROSTRUCTURABLE GLASS

Authors
SALIM R WURMUS H HARNISCH A HULSENBERG D
Citation
R. Salim et al., MICROGRIPPERS CREATED IN MICROSTRUCTURABLE GLASS, Microsystem technologies, 4(1), 1997, pp. 32-34
Citations number
5
Journal title
Microsystem technologies → ACNP
ISSN journal
09467076
Volume
4
Issue
1
Year of publication
1997
Pages
32 - 34
Database
ISI
SICI code
0946-7076(1997)4:1<32:MCIMG>2.0.ZU;2-3
Abstract
In this paper a new microgripper will be presented. The specific featu re is the microfabrication based on a UV-lithographic process in micro structurable, photosensitive glass. Technological and manufacturing pr oblems of the gripper will be described. The developed microgripper is actuated by a piezoelectric ceramic (monomorph). Glass microstructure s are used as solid state hinges. With the special design of the gripp er it is possible to realise a high distance ratio. The deflection of the gripping arms is some hundred micrometers. The gripping forces are a few mN up to 50 mN. The new grippers were fabricated and tested suc cessfully.