DIAMOND-LIKE CARBON PROTECTIVE FILMS FOR ORGANIC PHOTOCONDUCTORS

The deposition of a protective film to increase the hardness of an org anic photoconductor (OPC) surface is an effective method of lengthenin g the lifetime of the OPC. In this work, diamond-like carbon (DLC) pro tective films were deposited onto OPC samples by the electron cyclotro n resonance (ECR)-microwave plasma chemical vapor deposition (MPCVD) m ethod with low substrate temperature. The DLC films were deposited wit h optimized deposition conditions and exhibited high transmissivity an d high electrical resistivity. The films caused a remarkable increase in the hardness of the OPC surface, by a factor of 2.5 similar to 5.4. The acceptance voltage, dark decay fate, photodischarge rate, and con trast potential of the OPC protected by DLC film were improved. These results show DLC is a suitable protective film for OPC.