MULTITERM SOLUTION OF THE REACTIVE SPACE-TIME-DEPENDENT BOLTZMANN-EQUATION

The effect of spatial gradients, whether associated with surfaces or o therwise, on charged particle phase-space distribution functions and t ransport properties is a long-standing problem in the kinetic theory o f gases. This article first discusses the necessary ingredients for an accurate kinetic theory analysis of the space-time behavior of electr ons in gases and compares the different approaches currently in use. W e then focus upon the electrons in a radio-frequency discharge away fr om the walls, where gradients are weak, and point out that the fundame ntal kinetic theory of even the boundary-free problem still warrants m ore careful attention than has been given to it in much of the contemp orary literature. We highlighted the importance of careful analysis by presenting results for the first comprehensive ''multiterm'' solution of Boltzmann's equation furnishing the complete set of hydrodynamic t ransport coefficients for electrons in an ac field undergoing ionizati on and attachment. (C) 1998 American Vacuum Society.