Rd. White et al., MULTITERM SOLUTION OF THE REACTIVE SPACE-TIME-DEPENDENT BOLTZMANN-EQUATION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(1), 1998, pp. 316-323
Citations number
44
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
The effect of spatial gradients, whether associated with surfaces or o
therwise, on charged particle phase-space distribution functions and t
ransport properties is a long-standing problem in the kinetic theory o
f gases. This article first discusses the necessary ingredients for an
accurate kinetic theory analysis of the space-time behavior of electr
ons in gases and compares the different approaches currently in use. W
e then focus upon the electrons in a radio-frequency discharge away fr
om the walls, where gradients are weak, and point out that the fundame
ntal kinetic theory of even the boundary-free problem still warrants m
ore careful attention than has been given to it in much of the contemp
orary literature. We highlighted the importance of careful analysis by
presenting results for the first comprehensive ''multiterm'' solution
of Boltzmann's equation furnishing the complete set of hydrodynamic t
ransport coefficients for electrons in an ac field undergoing ionizati
on and attachment. (C) 1998 American Vacuum Society.