Zl. Petrovic et Vd. Stojanovic, THE ROLE OF HEAVY-PARTICLES IN KINETICS OF LOW CURRENT DISCHARGES IN ARGON AT HIGH-ELECTRIC-FIELD TO GAS NUMBER DENSITY RATIO, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(1), 1998, pp. 329-336
Citations number
55
Categorie Soggetti
Physics, Applied","Materials Science, Coatings & Films
We have developed a coupled system of Monte Carlo simulation codes for
modeling of electron, ion, and fast neutral kinetics in low pressure,
low current discharges. The procedure was tested for ion drift tube d
ata by using different cross-section sets including the recent anisotr
opic set of Phelps [A. V. Phelps, J. Appl. Phys. 76, 747 (1994)]. The
code was applied to modeling absolute emission profiles obtained at ve
ry high electric field to gas number density ratio, where heavy partic
le excitation dominates electron excitation by more than two orders of
magnitude, and also to an inhomogeneous field experiment of Scott and
Phelps [D. A. Scott and A. V. Phelps, Phys. Rev. A 43, 3043 (1991)].
The qualitative agreement between the Monte Carlo and experimental res
ults is good, giving confidence in the available models and data for i
on and fast neutral transport in gas discharges, and for their interac
tion with surfaces. (C) 1998 American Vacuum Society.