MICROSCOPIC PICTURE OF SI(113) - A NOVEL SURFACE RECONSTRUCTION, THE ORIGIN OF DEFECTS, AND THE PROCESS OF ADSORPTION - THEORETICAL AND EXPERIMENTAL-STUDY
J. Dabrowski et al., MICROSCOPIC PICTURE OF SI(113) - A NOVEL SURFACE RECONSTRUCTION, THE ORIGIN OF DEFECTS, AND THE PROCESS OF ADSORPTION - THEORETICAL AND EXPERIMENTAL-STUDY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(4), 1995, pp. 1597-1601
We report results of scanning tunneling microscope measurements and ab
initio calculations for Si(113). This surface is of general interest:
Ge islands on Si(001) and Si(111) have (113) facets, Si(113) is therm
ally stable despite its high index, and it has properties of a good su
bstrate. We bring into focus the peculiar atomic structure of Si(113)
which contains a novel structural unit built around a subsurface inter
stitial atom. Such interstitials may be present also at other surfaces
, particularly at steps, and may play an important role in atomic diff
usion in the subsurface layer. The interstitials are sixfold coordinat
ed; this unexpected result disturbs the simple picture of reconstructi
on driven by rebonding of dangling bonds. Our calculations indicate th
at the interstitials are released when the surface dangling orbitals r
ebond, e.g., as the result of adsorption of atomic hydrogen or during
epitaxial growth. (C) 1995 American Vacuum Society.