Hj. Wen et al., STABILITY OF CAF2 SI(111) AND AL/CAF2/SI(111) INTERFACE SYSTEMS STUDIED WITH PHOTOELECTRON-SPECTROSCOPY AND SCANNING-TUNNELING-MICROSCOPY/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(4), 1995, pp. 1645-1652
The stability of CaF2/Si(111) and Al/CaF2/Si(111) interfaces under irr
adiation by light or electrons and upon thermal annealing was investig
ated by photoelectron spectroscopy and scanning-tunneling microscopy.
Deposition of CaF2 on Si(111)7x7 at 700 degrees C leads to a shift of
the Fermi-level position (E(F)) towards the Si valence-band maximum (V
BM), while subsequent light irradiation results in a back-shift of E(F
) towards its initial value. Upon flashing the irradiated surface at 7
00 degrees C, it shifts again towards the VBM. The variation of E(F) i
s assigned to a competition of interface states with surface states re
lated to irradiation-induced fluorine vacancies. These surface defects
are observed as localized surface charges in the scanning tunneling m
icroscopy images. A thin epitaxial Al layer on top of the CaF2 surface
strongly reduces the irradiation-induced effects and leads to a stabi
lization of E(F) at 0.30 eV above the VBM. (C) American Vacuum Society
.