FORMATION OF THE CESIX SI(111) INTERFACE

Citation
I. Manke et al., FORMATION OF THE CESIX SI(111) INTERFACE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(4), 1995, pp. 1657-1665
Citations number
18
Categorie Soggetti
Physics, Applied
ISSN journal
10711023
Volume
13
Issue
4
Year of publication
1995
Pages
1657 - 1665
Database
ISI
SICI code
1071-1023(1995)13:4<1657:FOTCSI>2.0.ZU;2-S
Abstract
The deposition of thin Ce films on Si(111) and subsequent or simultane ous annealing leads to the formation of various structurally, electron ically, and chemically different CeSix phases, as revealed by scanning -tunneling microscopy, low-energy electron diffraction, and photoelect ron spectroscopy. Several phases can coexist on the same sample, and w ith increasing annealing temperatures larger homogeneous domains are o bserved. This behavior is assigned to a mismatch of the lattices of th e Si-rich CeSix bulk compounds with that of the Si(111) substrate surf ace, resulting at temperatures above 700 degrees C in the formation of a thin film of hexagonal CeSi1.67, which does not exist as a bulk com pound. (C) 1995 American Vacuum Society.