U. Reschesser et al., SURFACE ORDERING ON GAAS(100) BY INDIUM-TERMINATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(4), 1995, pp. 1672-1678
The growth of indium-layers in the monolayer regime on As-rich (2X4)/c
(2X8)- and Ga-rich (4X2)/c(8X2)-GaAs(100) surfaces has been investigat
ed by scanning tunneling microscopy (STM), low-energy electron diffrac
tion (LEED), Auger electron spectroscopy (AES) and reflectance anisotr
opy spectroscopy (RAS). Clean (2X4)- and (4X2)-reconstructed surfaces
were prepared in UHV by thermal desorption of a protective arsenic lay
er deposited on top of GaAs(100) surfaces grown in a molecular beam ep
itaxy (MBE)-system. For the (2X4) reconstruction, the STM images show
As-dimer rows consisting mostly of two dimers per unit cell in the out
ermost layer. Besides a large number of kinks in the dimer rows, a sur
face roughness corresponding to about three bilayer steps (8.4 Angstro
m) is observed due to multiple layer nucleation during MBE growth. Aft
er deposition of indium and subsequent annealing to approximately 450
degrees C a well ordered reconstruction with c(8X2)-symmetry is establ
ished. The STM images show a pattern consisting of kink free, alternat
ing straight and broken rows oriented along the [110]-direction attrib
uted to In-dimer rows. Remarkably, the surface roughness of these In-t
erminated surfaces is strongly reduced. For the Ga-terminated (4X2) su
rface reconstruction, STM results show a surface terminated with Ga-di
mer rows, free of kinks, which appears flat over large areas similar t
o the In-terminated surface. After deposition of indium and annealing
to 450 degrees C, LEED, RAS and STM reveal a surface structure very si
milar to that formed on the (2X4)-surface. Thus we conclude that in bo
th eases a structure with In-dimer-rows on top of an As-layer (second
layer) is formed. The smoothing of the surface roughness is a conseque
nce of the larger mobility of the group III surface atoms, following t
he As desorption. (C) 1995 American Vacuum Society.