IN-SITU BALLISTIC-CARRIER SPECTROSCOPY ON EPITAXIAL COSI2 SI(111) ANDSI(100)/

In situ ballistic-electron-emission microscopy (BEEM) and spectroscopy (BEES) have been performed at 77 K on CoSi2/Si(100) and Si(111) grown by molecular beam epitaxy (MBE). Scattering at individual interface d islocations and point defects gives rise to a localized increase of th e BEEM current on n-Si(111) and a decrease on p-Si(111) in agreement w ith a kinematic interpretation. On n-Si(100), (110)-oriented grains ex hibit a Schottky barrier of 0.58+/-0.04 V compared to 0.74+/-0.04 V on (100)-oriented CoSi2. The magnitude of the BEEM current strongly depe nds on the epitaxial orientation on Si(100) and is comparable for CoSi 2(100)/n-Si(100) and CoSi2/n-Si(111). (C) 1995 American Vacuum Society